Problem epi2 SNF 2010-03-19 12:19:32: Ch A heater contactor off & low water flow

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri Mar 19 12:19:33 PDT 2010

Previous message: Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber
Next message: Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57%
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

When going from Cold idle to Hot idle, gave the above 2 faults.  Now back in Inert idle.

Previous message: Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber
Next message: Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57%
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list