Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57%
jasonlin at snf.stanford.edu
jasonlin at snf.stanford.edu
Mon Mar 22 22:31:37 PDT 2010
Chamber then went into Isolated state. One wafer stuck inside, was in the middle of process.
More information about the epi2-pcs
mailing list