Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Mar 23 10:26:30 PDT 2010
Dop2 cylinder pressure was OK. Unloaded the user's wafer. Need to find out which recipe the user was running (was not in logbook).
More information about the epi2-pcs
mailing list