Problem epi2 SNF 2010-03-24 00:43:03: Wafer sense failed on LLB
bchui at snf.stanford.edu
bchui at snf.stanford.edu
Wed Mar 24 00:43:04 PDT 2010
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Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow
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Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.
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Error message said "AI error"
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Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow
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Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.
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