Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed Mar 24 12:44:20 PDT 2010


Wafer sense in CHB doesn't work. Needs to creaste wafers by yourself. THe cassette in LLA is probably too dirty that when i start to transfer wafers from LLA to ChA. THe wafer was stock in transfer chamber. Only this cassette does'nt work. The best way is to move the cassette from LLB to LLA and use LLA for process only. 




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