Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Mar 26 07:06:48 PDT 2010
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Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.
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Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57%
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could not repeat problem
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Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.
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Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57%
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