March 2010 Archives by date

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Starting: Mon Mar 1 19:32:44 PST 2010
Ending: Wed Mar 31 08:33:25 PDT 2010
Messages: 42

• Comment epi2 SNF 2010-03-01 19:32:43: haze updates   slcheng at snf.stanford.edu
• Comment epi2 SNF 2010-03-02 08:48:44: dome inspected:clear   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-05 22:24:52: Transfer Robot TOP/EXT axis   slcheng at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-08 08:59:41: Robot arm not moving   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-03-08 14:36:44: Update robot arm   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-08 08:59:41: Robot arm not moving   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2010-03-05 22:24:52: Transfer Robot TOP/EXT axis   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-03-08 14:36:44: Update robot arm   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-03-10 19:36:08: Unload test wafers   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-03-10 19:36:08: Unload test wafers   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-15 14:48:08: Wafer lift problem   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-15 14:48:08: Wafer lift problem   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault   jasonlin at snf.stanford.edu
• Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber   ryw at snf.stanford.edu
• Problem epi2 SNF 2010-03-17 00:45:31: Ch A Pressure Deviation Fault   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2010-03-17 12:39:52: wafer too far off the center in transfer chamber   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2010-03-19 12:19:32: Ch A heater contactor off & low water flow   jasonlin at snf.stanford.edu
• Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57%   jasonlin at snf.stanford.edu
• Problem epi2 SNF 2010-03-22 22:47:13: Cannot close LLA door   jasonlin at snf.stanford.edu
• Comment epi2 SNF 2010-03-22 22:49:51: LLA Door now closed   jasonlin at snf.stanford.edu
• Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2010-03-24 00:43:03: Wafer sense failed on LLB   bchui at snf.stanford.edu
• Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.   slcheng at snf.stanford.edu
• Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57%   jasonlin at snf.stanford.edu
• Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57%   Ted Kamins
• Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57%   Maurice Stevens
• Problem epi2 SNF 2010-03-25 00:46:46: DOP2 Deviation by 57%   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-24 12:44:20: Wafer sense fail in CHB; LLA cassette needs reclean.   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-03-23 10:26:30: Update low DOP2 flow   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-22 22:47:13: Cannot close LLA door   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-22 22:31:36: DOP2 Deviation by 57%   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-02-26 14:38:18: hazy getting better   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-01-04 15:44:43: Silicon dep looks ok   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-02-27 11:08:52: Ge Haze Update   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-03-01 19:32:43: haze updates   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-03-02 08:48:44: dome inspected:clear   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-03-22 22:49:51: LLA Door now closed   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-26 09:55:55: low wafer flow problem during etch coat   cursive at snf.stanford.edu
• Problem epi2 SNF 2010-03-28 11:07:13: take long time to ramp to 1000'C   cursive at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-29 15:39:56: contact shutting off during etch   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-03-31 08:33:25: Update   eenriquez at snf.stanford.edu

Last message date: Wed Mar 31 08:33:25 PDT 2010
Archived on: Sun Dec 23 08:52:54 PST 2012

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