Comment epi2 SNF 2010-05-04 14:51:17: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 4 14:51:18 PDT 2010


Resolved the manometer reading problem.  Found one of the connector was loose.  Placed the chamber online and ran the Big Etch recipe.  Process faulted for Ch.A overpressure during the clean.  
AMAT field service told me that there is a good chance that they will be here tomorrow.




More information about the epi2-pcs mailing list