Comment epi2 SNF 2010-05-05 19:03:02: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 5 19:03:03 PDT 2010


Field service repaired lamp problem.  He replaced 2 burnt fuses located in the upper electrical chasis.  Now faulting chamber over pressure when running the Big Etch recipe.  Field service will be back tomorrow.




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