Shutdown epi2 SNF 2010-05-07 11:03:20: wafer slide
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri May 7 11:03:21 PDT 2010
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Problem epi2 SNF 2010-04-15 04:43:50: can't proceed hot idle from cold idle
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Shutdown epi2 SNF 2010-05-07 11:03:20: wafer slide
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Problem epi2 SNF 2010-04-15 04:43:50: can't proceed hot idle from cold idle
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Shutdown epi2 SNF 2010-05-07 11:03:20: wafer slide
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