Problem epi2 SNF 2010-05-08 12:49:52: Heat contact off error

narii at snf.stanford.edu narii at snf.stanford.edu
Sat May 8 12:49:52 PDT 2010

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Once in a while, heat contact off error occurs while etch Ge recipe.

Previous message: Shutdown epi2 SNF 2010-05-07 11:03:20: wafer slide
Next message: Problem epi2 SNF 2010-05-08 15:39:54: Heater Contactor Off & Low Water Flow error
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