Problem epi2 SNF 2010-05-08 15:39:54: Heater Contactor Off & Low Water Flow error

jasonlin at jasonlin at
Sat May 8 15:39:54 PDT 2010

During step 9 of Ge Etch Coat, system then goes into Isolated state.
Tried again, but gave same error at same place during Ge Etch Coat.  Unable to use system.
What should we do when this happens?

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