Comment epi2 SNF 2010-05-17 18:10:49: update
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon May 17 18:10:49 PDT 2010
Elmer and Sean (AMAT field service) found that bypassing the inline filter in the process cooling line on the Epi2 leg dramatically increased water flow to the tool. Elmer will talk to facilities in the morning about this.
Additionally, they found restricted water flow in the upper lamp cooling shield and in the lower lamp cooling loop quick disconnects. The upper shield will be pulled from the system tomorrow to be flushed out. New quick disconnect fittings are being ordered.
-m
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