From tberg at snf.stanford.edu Mon Nov 1 07:25:10 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 1 Nov 2010 07:25:10 -0700 Subject: Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault Message-ID: Vacuumed water from scrubber. reset From narii at snf.stanford.edu Tue Nov 2 03:42:00 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 2 Nov 2010 03:42:00 -0700 Subject: Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again Message-ID: Wafer is still inside of the chamber From tberg at snf.stanford.edu Tue Nov 2 07:46:21 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Nov 2010 07:46:21 -0700 Subject: Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again Message-ID: Vacuumed out water in bottom of scrubber. recovered wafer,running GEtch-coat From tberg at snf.stanford.edu Tue Nov 2 07:47:05 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Nov 2010 07:47:05 -0700 Subject: Comment epi2 SNF 2010-10-29 06:36:12: Had scrubber fault-reset Message-ID: noted From maurice at snf.stanford.edu Tue Nov 2 11:35:31 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Nov 2010 11:35:31 -0700 Subject: Problem epi2 SNF 2010-06-09 23:49:24: light pen needs callibration. Message-ID: monitor moved From maurice at snf.stanford.edu Tue Nov 2 11:35:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Nov 2010 11:35:47 -0700 Subject: Comment epi2 SNF 2009-07-09 10:54:47: 20 KW temp test Message-ID: logged From maurice at snf.stanford.edu Wed Nov 3 08:08:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:08:26 -0700 Subject: Problem epi2 SNF 2010-04-12 10:44:58: Load Lock B not working Message-ID: archived From maurice at snf.stanford.edu Wed Nov 3 08:09:44 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:09:44 -0700 Subject: Problem epi2 SNF 2010-11-03 08:09:43: Use LLA for loading wafers Message-ID: LLB is not mapping. We will have AMAT FS look at it the next time they are here for something. From tberg at snf.stanford.edu Wed Nov 3 10:42:17 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 3 Nov 2010 10:42:17 -0700 Subject: Problem epi2 SNF 2010-10-14 09:54:36: pressure control update Message-ID: Replaced throttle valve and did pcv cal and home From tberg at snf.stanford.edu Wed Nov 3 10:42:26 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 3 Nov 2010 10:42:26 -0700 Subject: Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure Message-ID: Replaced throttle valve and did pcv cal and home From alsune at snf.stanford.edu Fri Nov 5 23:35:12 2010 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 5 Nov 2010 23:35:12 -0700 Subject: Comment epi2 SNF 2010-11-05 23:35:12: heater contactor error Message-ID: during the chamber cleaning after the process recipe, heater contactor error occured. chamber A was isolated, but could online the chamber again. From jasonlin at snf.stanford.edu Sat Nov 6 01:21:40 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sat, 6 Nov 2010 01:21:40 -0700 Subject: Problem epi2 SNF 2010-11-06 01:21:40: ChA lift cannot reach home Message-ID: so cannot get out of isolated state. From narii at snf.stanford.edu Mon Nov 8 19:19:44 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 8 Nov 2010 19:19:44 -0800 Subject: Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles Message-ID: My MHAH Ge on top of bare Si wafer looks horrible. Plus, Ge etch coat recipe seems like changed recently, and running time seems not quite right (from my memory it was ~15min, but now it barely over 10min) From maurice at snf.stanford.edu Tue Nov 9 11:37:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Nov 2010 11:37:00 -0800 Subject: Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch Message-ID: cleaning up dome and susceptor From tberg at snf.stanford.edu Fri Nov 12 09:39:56 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 12 Nov 2010 09:39:56 -0800 Subject: Comment epi2 SNF 2010-11-12 09:39:55: Changed Dome Message-ID: Replaced upper dome, Maurice is testing. From maurice at snf.stanford.edu Fri Nov 12 10:03:01 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Nov 2010 10:03:01 -0800 Subject: Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch Message-ID: After dome replaced temps read: upper 879 lower 880 Looks good. Now we bake system and check for haze on the wafers From maurice at snf.stanford.edu Fri Nov 12 10:05:10 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Nov 2010 10:05:10 -0800 Subject: Shutdown epi2 SNF 2010-11-12 10:05:10: Dome replaced/baking out/checking for haze Message-ID: After dome replaced temps read: upper 879 lower 880 Looks good. Now we are baking system and will check for haze on the wafers From maurice at snf.stanford.edu Fri Nov 12 10:05:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Nov 2010 10:05:40 -0800 Subject: Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles Message-ID: Dome coated/ replaced From maurice at snf.stanford.edu Fri Nov 12 11:27:38 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Nov 2010 11:27:38 -0800 Subject: Shutdown epi2 SNF 2010-11-12 11:27:38: Process cooling water going off Message-ID: From maurice at snf.stanford.edu Fri Nov 12 14:07:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Nov 2010 14:07:37 -0800 Subject: Shutdown epi2 SNF 2010-11-12 11:27:38: Process cooling water going off Message-ID: Water back on... From tberg at snf.stanford.edu Mon Nov 15 11:08:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Nov 2010 11:08:38 -0800 Subject: Shutdown epi2 SNF 2010-11-12 10:05:10: Dome replaced/baking out/checking for haze Message-ID: Baked out. I am putting it to yellow if someone wants to test it. Maurice is out today From narii at snf.stanford.edu Mon Nov 15 20:58:28 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 15 Nov 2010 20:58:28 -0800 Subject: Problem epi2 SNF 2010-11-15 20:58:28: N2 supply too high Message-ID: N2 pressure seems higher than maximum 40 psi value. From maurice at snf.stanford.edu Tue Nov 16 12:18:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Nov 2010 12:18:47 -0800 Subject: Shutdown epi2 SNF 2010-11-16 12:18:47: Load A not pumping down Message-ID: From tberg at snf.stanford.edu Tue Nov 16 13:54:54 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Nov 2010 13:54:54 -0800 Subject: Comment epi2 SNF 2010-11-16 13:54:53: Restarted loadlock pump Message-ID: Restarted loadlock pump and did BF in and out pumped Ok From maurice at snf.stanford.edu Tue Nov 16 14:49:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Nov 2010 14:49:17 -0800 Subject: Shutdown epi2 SNF 2010-11-16 12:18:47: Load A not pumping down Message-ID: Ted restarted ll pump From maurice at snf.stanford.edu Tue Nov 16 14:51:31 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Nov 2010 14:51:31 -0800 Subject: Problem epi2 SNF 2010-11-06 01:21:40: ChA lift cannot reach home Message-ID: Homing ok...for now From maurice at snf.stanford.edu Tue Nov 16 14:52:10 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 16 Nov 2010 14:52:10 -0800 Subject: Problem epi2 SNF 2010-11-15 20:58:28: N2 supply too high Message-ID: normal warning...almost always happens during start up From takashifuse at snf.stanford.edu Wed Nov 17 10:54:07 2010 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Wed, 17 Nov 2010 10:54:07 -0800 Subject: Problem epi2 SNF 2010-11-17 10:54:06: Chamber Isolated Message-ID: During Ge-Etchcoat recipe, Pressure deviation was occured. And Chamber A status is isolated. I can't return to chamber Idle mode. From maurice at snf.stanford.edu Wed Nov 17 11:34:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Nov 2010 11:34:20 -0800 Subject: Problem epi2 SNF 2010-11-17 10:54:06: Chamber Isolated Message-ID: brought chamber pump online then brought chanber online From tberg at snf.stanford.edu Wed Nov 17 11:43:40 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 17 Nov 2010 11:43:40 -0800 Subject: Comment epi2 SNF 2010-11-12 09:39:55: Changed Dome Message-ID: etched coated temp check OK From tberg at snf.stanford.edu Wed Nov 17 11:43:52 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 17 Nov 2010 11:43:52 -0800 Subject: Comment epi2 SNF 2010-11-16 13:54:53: Restarted loadlock pump Message-ID: noted From audet at snf.stanford.edu Thu Nov 18 10:49:27 2010 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Thu, 18 Nov 2010 10:49:27 -0800 Subject: Problem epi2 SNF 2010-11-18 10:49:26: chamber over pressure error Message-ID: chamber over pressure error occured during clean cycle From grahamab at snf.stanford.edu Thu Nov 18 18:02:34 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 18 Nov 2010 18:02:34 -0800 Subject: Shutdown epi2 SNF 2010-11-18 18:02:33: chamber lift cannot reach exchange position Message-ID: repeatedly got this error. managed to reset the tool after the first time, recover the wafer, and have it back to active idle. after processing next wafer, gave same error, and gave up on resetting it and trying it again after recovering my wafer yet again. can we get field service in to address this issue since it has been happening regularly? From grahamab at snf.stanford.edu Thu Nov 18 18:10:10 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 18 Nov 2010 18:10:10 -0800 Subject: Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch Message-ID: also forgot, chamber needs a cleaning recipe run. couldn't run since was perpetually in the FLT RESET state after error (would never get back to inert idle since lift wouldn't reach correct position). From tberg at snf.stanford.edu Fri Nov 19 09:18:07 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Nov 2010 09:18:07 -0800 Subject: Shutdown epi2 SNF 2010-11-18 18:02:33: chamber lift cannot reach exchange position Message-ID: Adjusted lift speed, ran etch coat , all looks OK now From tberg at snf.stanford.edu Fri Nov 19 09:18:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Nov 2010 09:18:14 -0800 Subject: Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch Message-ID: From tberg at snf.stanford.edu Fri Nov 19 09:18:45 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Nov 2010 09:18:45 -0800 Subject: Problem epi2 SNF 2010-11-18 10:49:26: chamber over pressure error Message-ID: Ran etch coat no problem From grahamab at snf.stanford.edu Fri Nov 19 10:33:32 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 19 Nov 2010 10:33:32 -0800 Subject: Shutdown epi2 SNF 2010-11-19 10:33:31: lift failed to reach exchange position Message-ID: manage to get about 3 wafers through before receiving the same error as last night. did it prior to receiving a wafer this time, rather than when trying to send a wafer. From tberg at snf.stanford.edu Fri Nov 19 12:39:13 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Nov 2010 12:39:13 -0800 Subject: Shutdown epi2 SNF 2010-11-19 10:33:31: lift failed to reach exchange position Message-ID: adjusted lifted checked numerous times Looks fine now From ehe at snf.stanford.edu Sat Nov 20 01:17:15 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 20 Nov 2010 01:17:15 -0800 Subject: Problem epi2 SNF 2010-11-20 01:17:15: errors during cleaning steps Message-ID: First recipe ok. Overpressure error after 6 mins of "GE ETCH COAT", then "ChA lift cannot reach process position". Managed to get chamber back online and run etch, this time without any errors. Starting second recipe... From narii at snf.stanford.edu Sun Nov 21 01:00:12 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 21 Nov 2010 01:00:12 -0800 Subject: Problem epi2 SNF 2010-11-21 01:00:12: DCS not flowing Message-ID: DCS is not flowing, so cannot run cleaning recipe From angiel at snf.stanford.edu Sun Nov 21 12:02:16 2010 From: angiel at snf.stanford.edu (angiel at snf.stanford.edu) Date: Sun, 21 Nov 2010 12:02:16 -0800 Subject: Problem epi2 SNF 2010-11-21 12:02:16: DCS flow deviated Message-ID: Got error saying "DCS flow deviated by 99%" during Ge Etch Coat run. From tberg at snf.stanford.edu Mon Nov 22 06:37:35 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Nov 2010 06:37:35 -0800 Subject: Problem epi2 SNF 2010-11-21 01:00:12: DCS not flowing Message-ID: Reset DCS- ran siGe etch coat no problem From tberg at snf.stanford.edu Mon Nov 22 06:37:46 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Nov 2010 06:37:46 -0800 Subject: Problem epi2 SNF 2010-11-21 12:02:16: DCS flow deviated Message-ID: Reset DCS- ran siGe etch coat no problem From tberg at snf.stanford.edu Mon Nov 22 06:38:11 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Nov 2010 06:38:11 -0800 Subject: Problem epi2 SNF 2010-11-20 01:17:15: errors during cleaning steps Message-ID: noted From tberg at snf.stanford.edu Mon Nov 22 06:38:49 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Nov 2010 06:38:49 -0800 Subject: Comment epi2 SNF 2010-11-05 23:35:12: heater contactor error Message-ID: This often happens on first run after an idle period From narii at snf.stanford.edu Tue Nov 23 17:17:16 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 23 Nov 2010 17:17:16 -0800 Subject: Problem epi2 SNF 2010-11-23 17:17:15: Particles again Message-ID: The same problem we had a week ago. Lots of particles at Ge on bare Si wafer. A couple of AAApoweretch run followed by coat recipe couldn't solve the problem. From ehe at snf.stanford.edu Thu Nov 25 13:05:59 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 25 Nov 2010 13:05:59 -0800 Subject: Comment epi2 SNF 2010-11-25 13:05:58: found system in hot idle Message-ID: From ehe at snf.stanford.edu Fri Nov 26 13:17:04 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 26 Nov 2010 13:17:04 -0800 Subject: Comment epi2 SNF 2010-11-26 13:17:03: assorted error messages Message-ID: during cleans: pressure setpoint deviation, 33% DCS deviation during pumpdown: chA pressure valve failed to close during hot idle: heater contactor off Managed to recover chamber from isolation/rerun etch recipe in any case, recipes seemed to run ok otherwise. From narii at snf.stanford.edu Fri Nov 26 23:59:27 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Fri, 26 Nov 2010 23:59:27 -0800 Subject: Problem epi2 SNF 2010-11-26 23:59:26: DCS error Message-ID: While running previous user's chamber cleaning recipe, DCS deviation error occured. Monitor said DCS flow as 'error' sccm, which is the same error we had a few days before. From junam at snf.stanford.edu Sat Nov 27 17:22:18 2010 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sat, 27 Nov 2010 17:22:18 -0800 Subject: Problem epi2 SNF 2010-11-27 17:22:15: dcs error Message-ID: during the cleaning recioe run, "ch a dcs flow deviated by 96 %" From shott at snf.stanford.edu Sun Nov 28 09:40:12 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 28 Nov 2010 09:40:12 -0800 Subject: Comment epi2 SNF 2010-11-28 09:40:11: Reset DCS excess flow switch. Message-ID: Epi2 users: Over the weekend, a couple of folks have reported a DCS flow error. This is likely due to the excess flow switch on that line that has "tripped" so that it shuts off the DCS source at the bottle. We believe that this is due to a failed or failing excess flow switch. We have ordered a replacement. I don't know whether it has arrived, but when it does arrive, we will shutdown the DCS line so that we can replace this switch. In the meantime, I've reset the DCS flow switch and confirmed that the pressure in the line increases from -8.0 PSIG to approximately 4.5 PSIG. I believe that you should be able to use DCS under these conditiions, but caution everyone to keep a close eye on the DCS flow. I'm not clearing the problems that report this ... because we haven't addreressed the underlying problem ... but believe that with close monitoring of the DCS flow, you should be OK to process. Happy processing, John From maurice at snf.stanford.edu Mon Nov 29 09:45:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Nov 2010 09:45:37 -0800 Subject: Shutdown epi2 SNF 2010-11-29 09:45:36: PCV not homing Message-ID: From maurice at snf.stanford.edu Mon Nov 29 11:16:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:16:20 -0800 Subject: Shutdown epi2 SNF 2010-11-29 09:45:36: PCV not homing Message-ID: Mike pulled and cleaned pressure control valve (PCV). PCV has been homed and calibrated by the system. Ran two Ge_etch recipes with no problems. From maurice at snf.stanford.edu Mon Nov 29 11:16:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:16:48 -0800 Subject: Comment epi2 SNF 2010-11-25 13:05:58: found system in hot idle Message-ID: logged From maurice at snf.stanford.edu Mon Nov 29 11:18:31 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:18:31 -0800 Subject: Problem epi2 SNF 2010-11-26 23:59:26: DCS error Message-ID: see John Shott's 2010/11/28 09:40:11 coral message about the DCS excess flow switch From maurice at snf.stanford.edu Mon Nov 29 11:19:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:19:25 -0800 Subject: Comment epi2 SNF 2010-11-26 13:17:03: assorted error messages Message-ID: Good recovery by ehe From maurice at snf.stanford.edu Mon Nov 29 11:19:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:19:54 -0800 Subject: Comment epi2 SNF 2010-10-13 11:33:38: ran etches Message-ID: logged From zpatel at snf.stanford.edu Tue Nov 30 18:46:22 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 30 Nov 2010 18:46:22 -0800 Subject: Problem epi2 SNF 2010-11-30 18:46:22: 2 wafers missing Message-ID: