Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again
narii at snf.stanford.edu
narii at snf.stanford.edu
Tue Nov 2 03:42:00 PDT 2010
Previous message:
Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault
Next message:
Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Wafer is still inside of the chamber
Previous message:
Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault
Next message:
Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the epi2-pcs mailing list