Problem epi2 SNF 2010-10-14 09:54:36: pressure control update
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Nov 3 10:42:17 PDT 2010
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Replaced throttle valve and did pcv cal and home
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Problem epi2 SNF 2010-11-03 08:09:43: Use LLA for loading wafers
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Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure
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