Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles

narii at snf.stanford.edu narii at snf.stanford.edu
Mon Nov 8 19:19:44 PST 2010


My MHAH Ge on top of bare Si wafer looks horrible. Plus, Ge etch coat recipe seems like changed recently, and running time seems not quite right (from my memory it was ~15min, but now it barely over 10min)




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