Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Nov 9 11:37:00 PST 2010
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Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles
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Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch
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cleaning up dome and susceptor
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Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles
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Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch
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