Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Nov 12 10:03:01 PST 2010
After dome replaced temps read:
upper 879
lower 880
Looks good.
Now we bake system and check for haze on the wafers
More information about the epi2-pcs
mailing list