Shutdown epi2 SNF 2010-11-12 10:05:10: Dome replaced/baking out/checking for haze

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Nov 12 10:05:10 PST 2010


After dome replaced temps read:
upper 879
lower 880
Looks good.
Now we are baking system and will check for haze on the wafers




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