Problem epi2 SNF 2010-11-17 10:54:06: Chamber Isolated

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Wed Nov 17 10:54:07 PST 2010


During Ge-Etchcoat recipe, Pressure deviation was occured.
And Chamber A status is isolated.
I can't return to chamber Idle mode.




More information about the epi2-pcs mailing list