Shutdown epi2 SNF 2010-11-18 18:02:33: chamber lift cannot reach exchange position

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Nov 18 18:02:34 PST 2010


repeatedly got this error.  managed to reset the tool after the first time, recover the wafer, and have it back to active idle.  after processing next wafer, gave same error, and gave up on resetting it and trying it again after recovering my wafer yet again.  can we get field service in to address this issue since it has been happening regularly?




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