Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Nov 18 18:10:10 PST 2010


also forgot, chamber needs a cleaning recipe run.  couldn't run since was perpetually in the FLT RESET state after error (would never get back to inert idle since lift wouldn't reach correct position).




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