Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Fri Nov 19 09:18:14 PST 2010
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Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch
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Shutdown epi2 SNF 2010-11-19 10:33:31: lift failed to reach exchange position
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Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch
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