Shutdown epi2 SNF 2010-11-19 10:33:31: lift failed to reach exchange position

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Fri Nov 19 10:33:32 PST 2010


manage to get about 3 wafers through before receiving the same error as last night.  did it prior to receiving a wafer this time, rather than when trying to send a wafer.  




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