Problem epi2 SNF 2010-11-20 01:17:15: errors during cleaning steps

ehe at snf.stanford.edu ehe at snf.stanford.edu
Sat Nov 20 01:17:15 PST 2010


First recipe ok. Overpressure error after 6 mins of "GE ETCH COAT", then "ChA lift cannot reach process position". Managed to get chamber back online and run etch, this time without any errors. Starting second recipe...




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