Problem epi2 SNF 2010-11-23 17:17:15: Particles again

narii at snf.stanford.edu narii at snf.stanford.edu
Tue Nov 23 17:17:16 PST 2010


The same problem we had a week ago. Lots of particles at Ge on bare Si wafer. A couple of AAApoweretch run followed by coat recipe couldn't solve the problem.




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