Comment epi2 SNF 2010-11-26 13:17:03: assorted error messages

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Nov 26 13:17:04 PST 2010


during cleans: pressure setpoint deviation, 33% DCS deviation
during pumpdown: chA pressure valve failed to close
during hot idle: heater contactor off
Managed to recover chamber from isolation/rerun etch recipe in any case, recipes seemed to run ok otherwise.




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