Problem epi2 SNF 2010-11-26 23:59:26: DCS error

narii at snf.stanford.edu narii at snf.stanford.edu
Fri Nov 26 23:59:27 PST 2010


While running previous user's chamber cleaning recipe, DCS deviation error occured. Monitor said DCS flow as 'error' sccm, which is the same error we had a few days before.




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