Problem epi2 SNF 2010-11-26 23:59:26: DCS error

narii at narii at
Fri Nov 26 23:59:27 PST 2010

While running previous user's chamber cleaning recipe, DCS deviation error occured. Monitor said DCS flow as 'error' sccm, which is the same error we had a few days before.

More information about the epi2-pcs mailing list