Shutdown epi2 SNF 2010-11-29 09:45:36: PCV not homing

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Nov 29 11:16:20 PST 2010


Mike pulled and cleaned pressure control valve (PCV).
PCV has been homed and calibrated by the system.
Ran two Ge_etch recipes with no problems.




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