Comment epi2 SNF 2010-10-13 11:33:38: ran etches
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Nov 29 11:19:54 PST 2010
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Problem epi2 SNF 2010-11-30 18:46:22: 2 wafers missing
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Shutdown epi2 SNF 2010-11-29 09:45:36: PCV not homing
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Problem epi2 SNF 2010-11-30 18:46:22: 2 wafers missing
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