November 2010 Archives by thread

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Starting: Mon Nov 1 07:25:10 PDT 2010
Ending: Tue Nov 30 18:46:22 PST 2010
Messages: 59

Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again narii at snf.stanford.edu
- Problem epi2 SNF 2010-11-02 03:42:00: Scrubber fault again tberg at snf.stanford.edu
Comment epi2 SNF 2010-10-29 06:36:12: Had scrubber fault-reset tberg at snf.stanford.edu
Problem epi2 SNF 2010-06-09 23:49:24: light pen needs callibration. maurice at snf.stanford.edu
Comment epi2 SNF 2009-07-09 10:54:47: 20 KW temp test maurice at snf.stanford.edu
Problem epi2 SNF 2010-04-12 10:44:58: Load Lock B not working maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-03 08:09:43: Use LLA for loading wafers maurice at snf.stanford.edu
Problem epi2 SNF 2010-10-14 09:54:36: pressure control update tberg at snf.stanford.edu
Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure tberg at snf.stanford.edu
Comment epi2 SNF 2010-11-05 23:35:12: heater contactor error alsune at snf.stanford.edu
- Comment epi2 SNF 2010-11-05 23:35:12: heater contactor error tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-06 01:21:40: ChA lift cannot reach home jasonlin at snf.stanford.edu
- Problem epi2 SNF 2010-11-06 01:21:40: ChA lift cannot reach home maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles narii at snf.stanford.edu
- Problem epi2 SNF 2010-11-08 19:19:44: Wafer has many particles maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch maurice at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-09 11:36:59: doing long etch maurice at snf.stanford.edu
Comment epi2 SNF 2010-11-12 09:39:55: Changed Dome tberg at snf.stanford.edu
- Comment epi2 SNF 2010-11-12 09:39:55: Changed Dome tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-11-12 10:05:10: Dome replaced/baking out/checking for haze maurice at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-12 10:05:10: Dome replaced/baking out/checking for haze tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-11-12 11:27:38: Process cooling water going off maurice at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-12 11:27:38: Process cooling water going off maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-15 20:58:28: N2 supply too high narii at snf.stanford.edu
- Problem epi2 SNF 2010-11-15 20:58:28: N2 supply too high maurice at snf.stanford.edu
Shutdown epi2 SNF 2010-11-16 12:18:47: Load A not pumping down maurice at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-16 12:18:47: Load A not pumping down maurice at snf.stanford.edu
Comment epi2 SNF 2010-11-16 13:54:53: Restarted loadlock pump tberg at snf.stanford.edu
- Comment epi2 SNF 2010-11-16 13:54:53: Restarted loadlock pump tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-17 10:54:06: Chamber Isolated takashifuse at snf.stanford.edu
- Problem epi2 SNF 2010-11-17 10:54:06: Chamber Isolated maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-18 10:49:26: chamber over pressure error audet at snf.stanford.edu
- Problem epi2 SNF 2010-11-18 10:49:26: chamber over pressure error tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-11-18 18:02:33: chamber lift cannot reach exchange position grahamab at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-18 18:02:33: chamber lift cannot reach exchange position tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch grahamab at snf.stanford.edu
- Problem epi2 SNF 2010-11-18 18:10:10: needs chamber etch tberg at snf.stanford.edu
Shutdown epi2 SNF 2010-11-19 10:33:31: lift failed to reach exchange position grahamab at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-19 10:33:31: lift failed to reach exchange position tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-20 01:17:15: errors during cleaning steps ehe at snf.stanford.edu
- Problem epi2 SNF 2010-11-20 01:17:15: errors during cleaning steps tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-21 01:00:12: DCS not flowing narii at snf.stanford.edu
- Problem epi2 SNF 2010-11-21 01:00:12: DCS not flowing tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-21 12:02:16: DCS flow deviated angiel at snf.stanford.edu
- Problem epi2 SNF 2010-11-21 12:02:16: DCS flow deviated tberg at snf.stanford.edu
Problem epi2 SNF 2010-11-23 17:17:15: Particles again narii at snf.stanford.edu
Comment epi2 SNF 2010-11-25 13:05:58: found system in hot idle ehe at snf.stanford.edu
- Comment epi2 SNF 2010-11-25 13:05:58: found system in hot idle maurice at snf.stanford.edu
Comment epi2 SNF 2010-11-26 13:17:03: assorted error messages ehe at snf.stanford.edu
- Comment epi2 SNF 2010-11-26 13:17:03: assorted error messages maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-26 23:59:26: DCS error narii at snf.stanford.edu
- Problem epi2 SNF 2010-11-26 23:59:26: DCS error maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-27 17:22:15: dcs error junam at snf.stanford.edu
Comment epi2 SNF 2010-11-28 09:40:11: Reset DCS excess flow switch. shott at snf.stanford.edu
Shutdown epi2 SNF 2010-11-29 09:45:36: PCV not homing maurice at snf.stanford.edu
- Shutdown epi2 SNF 2010-11-29 09:45:36: PCV not homing maurice at snf.stanford.edu
Comment epi2 SNF 2010-10-13 11:33:38: ran etches maurice at snf.stanford.edu
Problem epi2 SNF 2010-11-30 18:46:22: 2 wafers missing zpatel at snf.stanford.edu

Last message date: Tue Nov 30 18:46:22 PST 2010
Archived on: Sun Dec 23 08:52:57 PST 2012

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