From seymour at snf.stanford.edu Fri Oct 1 09:26:40 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 1 Oct 2010 09:26:40 -0700 Subject: Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change Message-ID: From filip at snf.stanford.edu Fri Oct 1 15:01:17 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 1 Oct 2010 15:01:17 -0700 Subject: Problem epi2 SNF 2010-10-01 15:01:16: DCS flow deviation 155% Message-ID: process aborted automatically From grahamab at snf.stanford.edu Fri Oct 1 15:57:42 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 1 Oct 2010 15:57:42 -0700 Subject: Shutdown epi2 SNF 2010-10-01 15:57:41: DCS flow deviations - being monitored Message-ID: DCS flow was varying greatly. cooling water in the gas bunker has been reset and should fix the problems. Maurice is monitoring and will update before he leaves for the day. From maurice at snf.stanford.edu Fri Oct 1 17:02:13 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Oct 2010 17:02:13 -0700 Subject: Comment epi2 SNF 2010-10-01 17:02:13: DCS still unstable Message-ID: possible liquid in the lin. May have to be sucked out from the bottle side. System down until Monday. From seymour at snf.stanford.edu Mon Oct 4 07:56:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Oct 2010 07:56:28 -0700 Subject: Comment epi2 SNF 2010-10-04 07:56:28: DCS temp controller at 18.3 deg Message-ID: I pumped out the DCS line and let it sit in vacuum for a while to vaporize any bubbles in the line. I the allowed the line to come to bottle pressure of 3.4 psi slowly. From maurice at snf.stanford.edu Mon Oct 4 10:05:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:05:24 -0700 Subject: Comment epi2 SNF 2010-10-04 10:05:23: testing DCS Message-ID: From maurice at snf.stanford.edu Mon Oct 4 10:49:38 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:49:38 -0700 Subject: Comment epi2 SNF 2010-10-04 10:05:23: testing DCS Message-ID: flowed DCS manually...looks good at 50, 100 and 500sccm. Ran Ge etch program (which also flows DCS at the end to coat chamber)...no flow issue From maurice at snf.stanford.edu Mon Oct 4 10:50:31 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:50:31 -0700 Subject: Shutdown epi2 SNF 2010-10-01 15:57:41: DCS flow deviations - being monitored Message-ID: Ray pumped out the DCS line and let it sit in vacuum for a while to vaporize any bubbles in the line. I the allowed the line to come to bottle pressure of 3.4 psi slowly. From maurice at snf.stanford.edu Mon Oct 4 10:50:44 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:50:44 -0700 Subject: Problem epi2 SNF 2010-10-01 15:01:16: DCS flow deviation 155% Message-ID: Ray pumped out the DCS line and let it sit in vacuum for a while to vaporize any bubbles in the line. I the allowed the line to come to bottle pressure of 3.4 psi slowly. From maurice at snf.stanford.edu Mon Oct 4 10:51:24 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:51:24 -0700 Subject: Comment epi2 SNF 2010-10-01 17:02:13: DCS still unstable Message-ID: Ray pumped out the DCS line and let it sit in vacuum for a while to vaporize any bubbles in the line. I the allowed the line to come to bottle pressure of 3.4 psi slowly. From maurice at snf.stanford.edu Mon Oct 4 10:51:46 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:51:46 -0700 Subject: Comment epi2 SNF 2010-09-17 01:06:16: LL-A problems/resolution Message-ID: cleared From maurice at snf.stanford.edu Mon Oct 4 10:52:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:52:00 -0700 Subject: Comment epi2 SNF 2010-09-16 15:11:50: etched/after bulb change Message-ID: archive From maurice at snf.stanford.edu Mon Oct 4 10:52:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:52:37 -0700 Subject: Problem epi2 SNF 2010-09-08 10:17:18: Pressure Deviation Fault Message-ID: Problem has gone away for now. From maurice at snf.stanford.edu Mon Oct 4 10:53:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:53:11 -0700 Subject: Problem epi2 SNF 2010-08-03 10:31:12: backside coating Message-ID: Wafer center looks ok From maurice at snf.stanford.edu Tue Oct 5 14:54:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Oct 2010 14:54:35 -0700 Subject: Shutdown epi2 SNF 2010-10-05 14:54:34: Amat Throttle valve test Testing Message-ID: AMAT test throttle in system From eenriquez at snf.stanford.edu Wed Oct 6 19:40:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Oct 2010 19:40:17 -0700 Subject: Shutdown epi2 SNF 2010-10-06 19:40:16: Unable to pump below 1 torr Message-ID: From tberg at snf.stanford.edu Thu Oct 7 09:57:59 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Oct 2010 09:57:59 -0700 Subject: Shutdown epi2 SNF 2010-10-05 14:54:34: Amat Throttle valve test Testing Message-ID: throttle valve replaced and leak resolved ran GEetch coat should be ready when that finishes From tberg at snf.stanford.edu Thu Oct 7 09:58:18 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Oct 2010 09:58:18 -0700 Subject: Shutdown epi2 SNF 2010-10-06 19:40:16: Unable to pump below 1 torr Message-ID: throttle valve replaced and leak resolved ran GEetch coat should be ready when that finishes From junam at snf.stanford.edu Sat Oct 9 22:41:41 2010 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sat, 9 Oct 2010 22:41:41 -0700 Subject: Problem epi2 SNF 2010-10-09 22:41:40: error occurred Message-ID: chamber A pressure control valve fail to close From maurice at snf.stanford.edu Sun Oct 10 12:57:50 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 10 Oct 2010 12:57:50 -0700 Subject: Problem epi2 SNF 2010-10-09 22:41:40: error occurred Message-ID: Found system off line and PVC homing. Since homing wasn't completing it would not let system go oline. Manually homed PCV, brought system on line and commanded into cold idle. - EHE will try running a coat program. If it fails she will report it on coral From ehe at snf.stanford.edu Sun Oct 10 14:22:52 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 10 Oct 2010 14:22:52 -0700 Subject: Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch Message-ID: Maurice came in and got the chamber out of isolation by rehoming per his comment. I then retried the Ge Etch recipe three times with the same result - at the same point (10 mins in) an error occurs with DCS flow deviation >100%. From tberg at snf.stanford.edu Mon Oct 11 06:14:40 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 06:14:40 -0700 Subject: Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch Message-ID: reset excess flow on DCS and remade connections to excess flow switch.DCS is now at 6.1 psi From tberg at snf.stanford.edu Mon Oct 11 14:33:00 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Oct 2010 14:33:00 -0700 Subject: Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing Message-ID: Tool needs etch/coat From maurice at snf.stanford.edu Mon Oct 11 15:57:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Oct 2010 15:57:55 -0700 Subject: Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing Message-ID: etch coat complete From junam at snf.stanford.edu Mon Oct 11 18:46:55 2010 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Mon, 11 Oct 2010 18:46:55 -0700 Subject: Comment epi2 SNF 2010-10-11 18:46:54: wafer stuck Message-ID: Wafer stuck in chamber A. I don't know if I have to shut it down or not, so I am just leaving a note. Sorry... From filip at snf.stanford.edu Mon Oct 11 23:13:30 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 11 Oct 2010 23:13:30 -0700 Subject: Problem epi2 SNF 2010-10-11 23:13:29: overpressure errors Message-ID: cleared errors, back online brought back to active idle. However, overpressure error during GeEtchCoat. Cleared twice, and always aborts and goes into isolation during cleaning recipe due to over pressure. From maurice at snf.stanford.edu Tue Oct 12 11:20:08 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 12 Oct 2010 11:20:08 -0700 Subject: Comment epi2 SNF 2010-10-11 18:46:54: wafer stuck Message-ID: wafer retrieved From tberg at snf.stanford.edu Tue Oct 12 11:20:54 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 12 Oct 2010 11:20:54 -0700 Subject: Comment epi2 SNF 2010-10-12 11:20:53: homed throttle valve Message-ID: homed throttle valve, ran ge etchcoat ok From junam at snf.stanford.edu Tue Oct 12 18:47:18 2010 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Tue, 12 Oct 2010 18:47:18 -0700 Subject: Problem epi2 SNF 2010-10-12 18:47:18: LLA Message-ID: cannot close LLA From narii at snf.stanford.edu Tue Oct 12 23:10:56 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Tue, 12 Oct 2010 23:10:56 -0700 Subject: Problem epi2 SNF 2010-10-12 23:10:55: Overpressure error Message-ID: After 1 successful run, overpressure error occurs again From maurice at snf.stanford.edu Wed Oct 13 11:33:39 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Oct 2010 11:33:39 -0700 Subject: Comment epi2 SNF 2010-10-13 11:33:38: ran etches Message-ID: Homed PCV. Ran three GeEtches with no problem Ran constant power etch with no problem From tberg at snf.stanford.edu Thu Oct 14 06:07:59 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Oct 2010 06:07:59 -0700 Subject: Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change Message-ID: Maurice ran several etch coats without issue From tberg at snf.stanford.edu Thu Oct 14 06:08:15 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Oct 2010 06:08:15 -0700 Subject: Comment epi2 SNF 2010-10-04 07:56:28: DCS temp controller at 18.3 deg Message-ID: Maurice ran several etch coats without issue From tberg at snf.stanford.edu Thu Oct 14 06:08:26 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Oct 2010 06:08:26 -0700 Subject: Comment epi2 SNF 2010-10-12 11:20:53: homed throttle valve Message-ID: noted From tberg at snf.stanford.edu Thu Oct 14 06:08:51 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Oct 2010 06:08:51 -0700 Subject: Problem epi2 SNF 2010-10-11 23:13:29: overpressure errors Message-ID: Maurice ran several etch coats without issue From maurice at snf.stanford.edu Thu Oct 14 09:53:46 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 14 Oct 2010 09:53:46 -0700 Subject: Problem epi2 SNF 2010-10-12 18:47:18: LLA Message-ID: resolved From maurice at snf.stanford.edu Thu Oct 14 09:54:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 14 Oct 2010 09:54:37 -0700 Subject: Problem epi2 SNF 2010-10-14 09:54:36: pressure control update Message-ID: Ted and Elmer think our pressure control valve is about to die. We can home the valve and it runs for 3,4 or 5 wafers (wafers and cleans) and then give an overpressure warning. The overpressure warning always happens during the etch recipes because they run at 600 torr. That is good because users are not losing their wafer. But it is frustrating if you lose your reservation time and don't get wafers processed. Ted has contacted different groups at AMAT to get another valve as quickly as we can. And we will update you when we have more information about it. From edfei at snf.stanford.edu Thu Oct 14 12:36:30 2010 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Thu, 14 Oct 2010 12:36:30 -0700 Subject: Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door Message-ID: Wafer stuck in handler. Gives an error about wafer miscentering. LLA is also being unresponsive to Load/Unload commands. Had to manually close the door. From junil at snf.stanford.edu Thu Oct 14 19:02:14 2010 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Thu, 14 Oct 2010 19:02:14 -0700 Subject: Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error Message-ID: Ch A didn't go to Hot Idle due to heater contactor off / low water flow error. From narii at snf.stanford.edu Sun Oct 17 12:33:03 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 17 Oct 2010 12:33:03 -0700 Subject: Problem epi2 SNF 2010-10-17 12:33:02: Error while running recipe Message-ID: Pressure error occured while running the recipe. Ch.A is in isolate mode and my wafer is inside. Unable to return Ch.A to inert idle. From maurice at snf.stanford.edu Mon Oct 18 09:54:51 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Oct 2010 09:54:51 -0700 Subject: Shutdown epi2 SNF 2010-10-18 09:54:51: Can't home PCV Message-ID: PCV not homing in negitive position From tberg at snf.stanford.edu Mon Oct 18 11:46:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Oct 2010 11:46:23 -0700 Subject: Shutdown epi2 SNF 2010-10-18 09:54:51: Can't home PCV Message-ID: Exercised throttle valve ran home. active idle ran GEetch coat Fine From jasonlin at snf.stanford.edu Sun Oct 24 09:48:38 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 24 Oct 2010 09:48:38 -0700 Subject: Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error Message-ID: Found system with error message about lift not reaching home position. Previous user's wafer was stuck inside chamber. Attempted to bring chamber online and retrieve wafers, but pressure stays at 760torr, gives a PCV not working fault. System is now in isolated state, cannot bring online, previous user's wafers still stuck inside chamber. From tberg at snf.stanford.edu Mon Oct 25 07:46:23 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Oct 2010 07:46:23 -0700 Subject: Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error Message-ID: System reset it has been running fine From tberg at snf.stanford.edu Mon Oct 25 07:47:29 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Oct 2010 07:47:29 -0700 Subject: Problem epi2 SNF 2010-10-17 12:33:02: Error while running recipe Message-ID: reset/ homed throttle valve took system to hot idle no problem From tberg at snf.stanford.edu Mon Oct 25 07:48:46 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Oct 2010 07:48:46 -0700 Subject: Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error Message-ID: Reset system homed pcv brought to hot idle and back down. did not remove wafers From maurice at snf.stanford.edu Mon Oct 25 10:45:01 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Oct 2010 10:45:01 -0700 Subject: Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home Message-ID: touble shooting now From maurice at snf.stanford.edu Mon Oct 25 10:45:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Oct 2010 10:45:25 -0700 Subject: Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door Message-ID: wafer recovered From maurice at snf.stanford.edu Mon Oct 25 10:45:44 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Oct 2010 10:45:44 -0700 Subject: Problem epi2 SNF 2010-10-12 23:10:55: Overpressure error Message-ID: From tberg at snf.stanford.edu Mon Oct 25 12:52:07 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Oct 2010 12:52:07 -0700 Subject: Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home Message-ID: Adjusted lift speed seems Ok now From grahamab at snf.stanford.edu Tue Oct 26 10:54:12 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 26 Oct 2010 10:54:12 -0700 Subject: Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure Message-ID: appeared to have another PCV failure (same as before) during the last clean of the previous user. reset and working fine so far. From grahamab at snf.stanford.edu Wed Oct 27 11:56:55 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 27 Oct 2010 11:56:55 -0700 Subject: Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working Message-ID: same problem as last week. Maurice instructed to redlight the tool until it can be worked on. From tberg at snf.stanford.edu Wed Oct 27 14:22:17 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Oct 2010 14:22:17 -0700 Subject: Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working Message-ID: Adjusted lifter tested operation ran etch coat From cfchiang at snf.stanford.edu Wed Oct 27 19:24:09 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Wed, 27 Oct 2010 19:24:09 -0700 Subject: Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A Message-ID: When tried to unload wafer from chamber A, error message popped up. "Chamber A lift cannot reach exchange position." So, the wafer is still in the system. Also, I put another wafer in LLB for its low pressure. Sorry but have to shut down the system. From maurice at snf.stanford.edu Thu Oct 28 09:42:43 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 28 Oct 2010 09:42:43 -0700 Subject: Shutdown epi2 SNF 2010-10-27 19:24:09: wafer stuck in chamber A Message-ID: deleted wafer in chamber created wafer in transfer chamber homed robot rotation manually moved wafer to load lock - Ted exercised the wafer lift Andrew is running another wafer at temp to check handling From tberg at snf.stanford.edu Fri Oct 29 06:36:13 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Oct 2010 06:36:13 -0700 Subject: Comment epi2 SNF 2010-10-29 06:36:12: Had scrubber fault-reset Message-ID: From ehe at snf.stanford.edu Fri Oct 29 12:22:23 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 29 Oct 2010 12:22:23 -0700 Subject: Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault Message-ID: error message was "ChA main scrubber fault - manual gas flows not allowed" - aborted halfway through run From maurice at snf.stanford.edu Fri Oct 29 13:31:44 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Oct 2010 13:31:44 -0700 Subject: Problem epi2 SNF 2010-10-29 12:22:22: aborted recipe due to main scrubber fault Message-ID: problem already addressed by Ted and cleared at 6:36 this morning From cfchiang at snf.stanford.edu Sat Oct 30 11:21:50 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sat, 30 Oct 2010 11:21:50 -0700 Subject: Problem epi2 SNF 2010-10-30 11:21:49: ChA main scrubber fault Message-ID: The fault reported at 5am, saying Ch A main scrubber fault - manually gas flows not allowed. Chamber was brought to isolated.