Comment epi2 SNF 2010-10-04 10:05:23: testing DCS

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Oct 4 10:49:38 PDT 2010


flowed DCS manually...looks good at 50, 100 and 500sccm.
Ran Ge etch program (which also flows DCS at the end to coat chamber)...no flow issue




More information about the epi2-pcs mailing list