Problem epi2 SNF 2010-08-03 10:31:12: backside coating
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Oct 4 10:53:11 PDT 2010
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Problem epi2 SNF 2010-09-08 10:17:18: Pressure Deviation Fault
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Wafer center looks ok
Previous message:
Problem epi2 SNF 2010-09-08 10:17:18: Pressure Deviation Fault
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Shutdown epi2 SNF 2010-10-05 14:54:34: Amat Throttle valve test Testing
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