Problem epi2 SNF 2010-10-09 22:41:40: error occurred
junam at snf.stanford.edu
junam at snf.stanford.edu
Sat Oct 9 22:41:41 PDT 2010
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Shutdown epi2 SNF 2010-10-06 19:40:16: Unable to pump below 1 torr
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Problem epi2 SNF 2010-10-09 22:41:40: error occurred
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chamber A pressure control valve fail to close
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Shutdown epi2 SNF 2010-10-06 19:40:16: Unable to pump below 1 torr
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Problem epi2 SNF 2010-10-09 22:41:40: error occurred
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