Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch

ehe at snf.stanford.edu ehe at snf.stanford.edu
Sun Oct 10 14:22:52 PDT 2010


Maurice came in and got the chamber out of isolation by rehoming per his comment. I then retried  the Ge Etch recipe three times with the same result - at the same point (10 mins in) an error occurs with DCS flow deviation >100%. 




More information about the epi2-pcs mailing list