Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch

[ehe at snf.stanford.edu]

Maurice came in and got the chamber out of isolation by rehoming per his comment. I then retried  the Ge Etch recipe three times with the same result - at the same point (10 mins in) an error occurs with DCS flow deviation >100%.