Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch

tberg at snf.stanford.edu tberg at snf.stanford.edu
Mon Oct 11 06:14:40 PDT 2010


reset excess flow on DCS and remade connections to excess flow
 switch.DCS is now at 6.1 psi




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