Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Oct 11 14:33:00 PDT 2010
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Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch
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Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing
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Tool needs etch/coat
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Problem epi2 SNF 2010-10-10 14:22:52: DCS flow deviation error during Ge etch
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Comment epi2 SNF 2010-10-11 14:33:00: AMAT finished testing
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