Comment epi2 SNF 2010-10-11 18:46:54: wafer stuck

junam at snf.stanford.edu junam at snf.stanford.edu
Mon Oct 11 18:46:55 PDT 2010


Wafer stuck in chamber A. I don't know if I have to shut it down or not, so I am just leaving a note. Sorry...




More information about the epi2-pcs mailing list