Problem epi2 SNF 2010-10-11 23:13:29: overpressure errors

filip at snf.stanford.edu filip at snf.stanford.edu
Mon Oct 11 23:13:30 PDT 2010


cleared errors, back online brought back to active idle. However, overpressure error during GeEtchCoat. Cleared twice, and always aborts and goes into isolation during cleaning recipe due to over pressure.




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