Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Oct 14 06:07:59 PDT 2010
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Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change
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Maurice ran several etch coats without issue
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Problem epi2 SNF 2010-10-01 09:26:39: needs testiing after DCS change
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Problem epi2 SNF 2010-10-01 15:01:16: DCS flow deviation 155%
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