Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door

edfei at snf.stanford.edu edfei at snf.stanford.edu
Thu Oct 14 12:36:30 PDT 2010


Wafer stuck in handler.  Gives an error about wafer miscentering.  LLA is also being unresponsive to Load/Unload commands.  Had to manually close the door.




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