Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error

junil at snf.stanford.edu junil at snf.stanford.edu
Thu Oct 14 19:02:14 PDT 2010

Previous message: Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door
Next message: Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ch A didn't go to Hot Idle due to heater contactor off / low water flow error.

Previous message: Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door
Next message: Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list