Problem epi2 SNF 2010-10-17 12:33:02: Error while running recipe

narii at snf.stanford.edu narii at snf.stanford.edu
Sun Oct 17 12:33:03 PDT 2010


Pressure error occured while running the recipe. Ch.A is in isolate mode and my wafer is inside. Unable to return Ch.A to inert idle.




More information about the epi2-pcs mailing list