Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Sun Oct 24 09:48:38 PDT 2010


Found system with error message about lift not reaching home position.  Previous user's wafer was stuck inside chamber.  Attempted to bring chamber online and retrieve wafers, but pressure stays at 760torr, gives a PCV not working fault.
System is now in isolated state, cannot bring online, previous user's wafers still stuck inside chamber.




More information about the epi2-pcs mailing list