Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Oct 25 10:45:01 PDT 2010
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Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error
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Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home
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touble shooting now
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Problem epi2 SNF 2010-10-24 09:48:37: Ch A home lift & Pressure error
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Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home
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