Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Oct 25 10:45:25 PDT 2010
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Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door
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Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error
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wafer recovered
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Problem epi2 SNF 2010-10-14 12:36:29: Wafer Stuck and LLA Door
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Problem epi2 SNF 2010-10-14 19:02:13: ch A gave a heater contactor off / low water flow error
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