Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Oct 25 12:52:07 PDT 2010
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Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home
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Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure
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Adjusted lift speed seems Ok now
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Shutdown epi2 SNF 2010-10-25 10:45:01: wafer lift not reaching home
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Problem epi2 SNF 2010-10-26 10:54:11: another PCV failure
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