Shutdown epi2 SNF 2010-10-27 11:56:54: wafer lift in chamber not working

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Wed Oct 27 11:56:55 PDT 2010


same problem as last week.  Maurice instructed to redlight the tool until it can be worked on.




More information about the epi2-pcs mailing list